Model | PR500 | PR510 |
Method | Barrel type of direct plasma |
Controlpart |
Highfrequency output | Max.500W |
Oscillating frequency | 13.56MHz |
Outputimpedance | 50Ω |
Tuningmethod | Automatic tuning |
Instrument | Output watt meter (0 to 600W) Reflected wave watt meter (0 to 300W) Vacuum gauge, thermocouple type Flow meter, needle valve integrated type, 2 sets |
Timer | 0.1sec. to 999h |
Gasinlet | 1/4"stainless steel, 2 inlet |
Powersource (50/60Hz) | AC100/220V, single phase, 2 kVA |
Reactionpart |
Reactionchamber | Madeof quarts, φ215×305mm |
Electrodestructure | Condenser type, 4-way split |
Controlsystem | Autopressurereduction, auto leak valve | TouchpanelwithPLC control |
Pipingmaterial | SUS,Teflon |
Externaldimensions(W×D×Hmm) | 438×520×760 | 520×630×760 |
Weight | Approx.38kg | Approx.60kg |
StandardAccessories |
| - Connection cable :1completeset
- Vacuum grease : 1 pc.
- O-ring for reaction chamber:1pc.
|
OptionalAccessories |
Frame for wafers, 2, 3,4,5, 6 inches Multipurposeangledframe Aluminum etchingtunnel Stand |