Hiden EQP是一台结合质量和能量分析的仪器（Mass and Energy Analyser for Plasma Diagnostics），用于分析等离子过程中阴、阳离子、中性粒子以及自由基。
· 通过视口、接地电极和驱动电极进行分析
· 软件控制的离子汲取系统，以使等离子体扰动最小· 所有能量范围内，离子行程的最小扰动，及恒定离子传输
· 可调谐的离子源，用于电子附着选件的表观电势质谱分析
· Penning规和互锁装置可提供过压保护
· 高灵敏度 / 稳定的脉冲离子计数检测器，有7个数量级的动态范围
· 带差式泵的三级过滤四极杆，质量数范围至2500amu
· 45°静电扇区分析器，扫描能量增量 0.05 eV / 0.25eV FWHM
· 1000eV 选配,，漂浮电压可选至10keV；Faraday 检测器用于高密度等离子体
· Mu-Metal，Radio-metal 屏蔽可选，高压操作可选
· 信号选通分辨率0.1μs，用于研究脉冲等离子体或能量、质量分布随时间的变化
· 通过RS232、RS485或Ethernet LAN，控制软件MASsoft
EQP Mass and Energy Plasma Analyser (3.3 MB)
EQP Poster A3 size (254 KB)
EQP Poster A1 size (2.53 MB)
Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1 MB)
AP0280 Advantages of HIPIMS of Silver for Improved E. coli Inactivation (248 KB)
AP0319 High power impulse magnetron sputtering (HIPIMS) and traditional pulsed sputtering (DCMSP) Ag-surfaces leading to E. coli inactivation (233KB)
AP0322 Composition and Species Evolution in a Laser-induced LuMnO3 Plasma (381 KB)
AP0371 In-situ Monitoring of the Growth of Silver Thin Film – the Influence of Sputtering Gas (283 KB)
AP-EQP-0001 - Negative-ion Surface Production in Hydrogen Plasmas (286 KB)
AP-EQP-0002 - Highly selective etching of SiO2 over Si3N4 and Si in capacitively coupled plasma employing C5HF7 gas (658 KB)
Mass and Energy Spectra of Plasmas 50 ns Time Resolved Measurements
Atmospheric Plasma Analysis by Molecular Beam MS (1.38 MB)
Atmospheric Pressure Plasma Analysis ICPIG (256 KB)
Effects of Pulsing on the P-CFUBMS of CrAIN Coatings (3.6 MB)
Ion Energy Distributions for a DC Plasma (144 KB)
Mass Spectroscopy of Metastable Atomic Species in Gas Analysis and Processing Plasmas at High Spectrometer Source Pressures - AVS 2011 (1.6 MB)
Surface Analysis by Plasma Assisted Desorption Ionisation Mass Spectrometry (PADI-MS) (195 KB)
Energy/Mass Spectrometer Analyser and Langmuir Probe Diagnostics for HIPIMS (1.88 MB)
Plasma Diagnostics in High Power Impulse Magnetron Sputtering Discharges - TIRI JSFS 2012 Tokyo YAG (3.52 MB)
AmesTechnology Capabilities and Facilities | Plasma Diagnostics
Research featuring data from the Hiden Analytical EQP Mass and Energy Analyser for Plasma Diagnostics
PSI – Paul Scherrer Institut | Plasma & Thin Film Analysis
Plasma and Thin Film Analysis
