ATF6 SWIFT Sensor
WDI’s ATF6 SWIFT is a high speed, high accuracy, autonomous digital autofocus sensor. Its “Smart Sensor Architecture” (SSA) incorporates a semiconductor laser, built-in CMOS image sensor, FPGA and microprocessor for fast digital image processing. By projecting a laser line onto the sample and digitally processing the image, the ATF6 provides extremely fast and accurate measurements of the distance and direction to focus. This information can then be output directly to WDI’s MCM+ or MCZ controller, or to any compatible controller.
High Accuracy At Fast Speeds
WDI’s ATF6 SWIFT sensors project their focusing laser directly through the objective lens of the microscope. This “Through The Lens” (TTL) technique allows the ATF6 SWIFT to provide extremely accurate autofocus, with a success rate typically higher than 99%. The on-board digital processing coupled with an improved faster sampling rate allows it to maintain this accuracy with 3 times the speed of previous versions.
Static or Dynamic Autofocus
The ATF6 SWIFT is continually assessing distance and direction to focus, updating its data every 0.15 milliseconds. This allows the sensor to keep samples in focus regardless of whether they are stationary or in high speed motion.
Maximum Flexibility
By projecting a laser line, the AFT6 SWIFT sensor operates equally effectively on patterned and un-patterned specimens as well as diffusing and reflective surfaces making it ideal for media such as TFT arrays, photo masks and semiconductor wafers. The sensor also automatically adjusts its laser intensity and sensor expose time, allowing it to adapt from low reflectivity (down to 1%) to highly reflective (99%) surfaces. It is compatible with objectives from 2X to 100X, and
wavelengths including UV, NUV and NIR. The ATF6 SWIFT can also achieve focusing with a programmable Z offset function.
Easy Integration
All of the sensors in WDI’s ATF family are designed with ease of integration in mind. The ATF6 SWIFT can be purchased as either a stand-alone (SA) sensor with analog output, or as a full autofocus system (SYS), integrated with either WDI’s MCM+ controller for driving an external Z stage or MCZ controller which includes the ability to drive a two-phase stepper motor for Z actuation. All WDI’s ATF sensors have small, standardized footprints and connections, and can output in either analog or digital formats, making them both easy to install and easy to upgrade as application requirements evolve. The AFT6 SWIFT is also available in specially designed configurations; one for LCD inspection/repair, another designed for the unique requirements of OLED, LTPS & IG70 panel inspection and other suited for cell and module repair.
ATF6 SWIFT Sensor AUTO FOCUS & TRACKING SYSTEM
| Structured Light Pattern | Line Segment |
| Sensor Wavelength | Choice of 510nm, 660nm or 785nm |
| Image Detector | Area Scan CMOS |
| Internal Update Rate | 20kHz |
| Static Autofocus Accuracy | ± 1/4 Objective Depth of Field |
| Fast Tracking Autofocus Accuracy | ± 1/2 Objective Depth of Field |
| General Performance | |
| Output Data Rate6.5kHz6.5kHz | 6.5kHz |
| Reflectivity Adaption Delay | 1ms |
| Laser Type | Semiconductor |
| Laser Safety | Class 2 510, 660, 785nm |
| Weight | 250g |
| Dimensions | 40 X 40 X 120mm |
| Maximum Cable Length | 1.8m |
| Compliance | CE SEMI |
| External Requirements | |
| Specimen Reflectivity | 1% ~ 99% |
| Glass Thickness | > 0.5mm |
| Diffusing Specimen | Yes |
| Specular Specimen | Yes |
| Specular Specimen | Yes |
| Textured Specimen | Yes |
| Operating Specifications | |
| Input Voltage | 18V ~ 25V, 24V Nominal |
| Operating Temperature | 18°C ~ 35°C |
| Storage Temperature | 10°C ~ 44°C |
| Storage Temperature | 10% ~ 75% Non Condensing |
